Micro- and nanoelectronics 2007 (1-5 October 2007, Zvenigorod, Russia)Valiev, Kamil Akhmetovich; Orlikovskii, Aleksandr Aleksandrovich.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7, 1 v. (various pagings), isbn 978-0-8194-7238-0 0-8194-7238-7Conference Proceedings

Finite size effects in antiferromagnetic multilayersKOSTYUCHENKO, Victor V; KOSTYUCHENKO, Marina V.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250T.1-70250T.10, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Electromechanical energy conversion in the nanometer gapsKOSTSOV, E. G.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251G.1-70251G.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Graphene nanoelectronics : electrostatics and kineticsZEBREV, G. I.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250M.1-70250M.9, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Epitaxial Fe films and structuresMALIKOV, I. V; FOMIN, L. A; VINNICHENKO, V. Yu et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250U.1-70250U.111, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Molecular-beam epitaxy of ultrathin Si films on sapphireSHILYAEV, P. A; PAVLOV, D. A; KOROTKOV, E. V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250W.1-70250W.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Nanorelief elements in reference measures for scanning electron microscopyNOVIKOV, Yu. A; DARZNEK, S. A; FILIPPOV, M. N et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702511.1-702511.10, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Pulsed laser deposition of layers and nanostructures based on cadmium telluride and bismuthYEREMYAN, Arsham; AVETISYAN, Hovsep; AVJYAN, Karapet et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250R.1-70250R.6, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

A new model for the copper CMP kineticsGOLDSTEIN, R; MAKHVILADZE, T; SARYCHEV, M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251Q.1-70251Q.10, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Correction of the EUV mirror substrate shape by ion beamCHKHALO, N; PARAMONOV, L; PESTOV, A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702503.1-702503.4, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Effect of quartz window temperature on plasma composition during STI etchDANILKIN, E. V; SHAMIRYAN, D; BAKLANOV, M. R et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250E.1-70250E.10, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Method of creation of monomolecular transistor with overhanging electrodesSAPKOV, I. V; SOLDATOV, E. S; ELENSKY, V. G et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250P.1-70250P.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Modeling of Vertical Transistor with Electrically Variable Junctions in ISE TCADROGOZHIN, A. E; KHORIN, I. A; DROZDOV, D. G et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251O.1-70251O.9, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Simulation, fabrication and dynamics characteristics of electrostatically actuated switchesPOSTNIKOV, A. V; AMIROV, I. I; NAUMOV, V. V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251H.1-70251H.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Divergence Instability of an Extensible Microplate Subjected to nonlinear Electrostatic PressureREZAZADEH, Ghader; YAGUBIZADE, Hadi; ALIZADEH, Yashar et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251F.1-70251F.11, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

High energy microelecromechanical oscillator based on the electrostatic microactuatorBAGINSKY, I; KOSTSOV, E; SOBOLEV, V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251E.1-70251E.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Influence of vacancy clusters on the adhesion properties of interfacesGOLDSTEIN, R; MAKHVILADZE, T; SARYCHEV, M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251R.1-70251R.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographerCHKHALO, N; ZABRODIN, I; KAS'KOV, I et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702504.1-702504.5, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Investigation of re-switching properties of ferromagnetic contacts in Py/Mo microstructuresVINNICHENKO, V. Yu; CHERNYKH, A. V; FOMIN, L. A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250V.1-70250V.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Multilayer Zr/Si filters for EUV lithography and for radiation source metrologyBIBISHKIN, M. S; CHKHALO, N. I; ZUEV, S. Yu et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702502.1-702502.10, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Non-equilibrium magnetism of nanoparticles revealed in 'static' and radiofrequency measurementsCHUEV, M. A; AKSENOVA, N. P; MEDVEDEV, P. G et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250S.1-70250S.11, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

All-quantum simulation of an ultra-small SOI MOSFETVYURKOV, V; SEMENIKHIN, I; LUKICHEV, V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251K.1-70251K.12, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Creation of nanometer gaps between thin-film metal electrodes by the method of electromigrationKUTUROV, A. N; SOLDATOV, E. S; STEPANOV, A. S et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250Q.1-70250Q.10, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Manufacturing and investigation of objective lens for ultrahigh resolution lithography facilitiesCHKHALO, Nikolay I; KLUENKOV, Evgeniy B; PESTOV, Aleksey E et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702505.1-702505.6, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Mask Image Formation by Electron Beam Deposition from Vapor PhaseBRUK, M. A; ZHIKHAREV, E. N; SHEVCHUK, S. L et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702508.1-702508.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper